Quick Shot

The NexView 3D Optical Surface Profiler is Zygo’s flagship white-light interferometric microscope that can resolve subnanometer topography. LLE’s configuration will make it possible to measure nearly a complete range of fields of view from 40 × 40 µm to 13,700 x 13,700 µm, including stitching capabilities for larger areas. Optical Manufacturing Engineer, Brian Charles, is shown measuring a glass surrogate target for OMEGA EP. The instrument has been utilized for measurements on circular and linear gratings, target step-height measurements, 20-µm periodic structures that are about 2 µm in height, and characterizing the profiles of glancing angle deposition (GLAD) coatings. One scan in particular provided evidence of a 10-nm-high by 3‑mm-diam phase gradient in the center of a UV lens undetectable by vendors.