Multilayer-Dielectric Diffraction Gratings

2012:

Multilayer dielectric (MLD) diffraction gratings, used in OMEGA EP’s pulse compressors, must be cleaned with aggressive chemicals to remove manufacturing residues. Here, Horton Fellow Heather Howard uses Nomarski differential interference contrast (DIC) microscopy to inspect an MLD grating coupon for defects and mechanical damage following chemical cleaning.

Shown here is Horton fellow Heather Howard inspecting a multilayer dielectric grating coupon